The FIT-SLQX14E-001 cleans the surface of solar-grade silicon material to remove pollutants such as solid particles, organic matter, metal ions and natural oxide film attached to the surface. It does so through a process of acid cleaning, rinsing, and drying. After cleaning, the silicon material surface metal is not greater than 20ppbw, the cleaning pass rate is not less than 98%, and there is no acid residue on the silicon material surface.